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Abstract:
Dynamic
model issues of micro electromechanical systems (MEMS) with
electrostatic field coupling are studied. Firstly, input/output model
with two terminal pairs of electrostatic field is given. Selection and
analysis method of independent variable pairs for MEMS are discussed.
Secondly, two typical micro structures, which are developed in our lab,
including SEM photos, vibration modals of finite element analysis, and
simplified model, are described, Thirdly, The electrostatic field and
its force expressions, dynamic equations, and open loop & close loop
transfer functions of MEMS sensors are analyzed. Fourthly, The frequency
responses and equivalent model parameters obtained from tests are given,
and some significant conclusions are presented based on the results of
analysis and tests mentioned above.
Key words:
Micro
electromechanical systems Electrostatic field coupling
Dynamic model
CLC No: TM38
Received
20000406, received in revised form 20000911
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