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Abstract:
The
nonlinearity of moment-angle relationship of the beams in a kind of
micromachine vibratory angular rate sensor is derived by using energy
method. Under the considering of this nonlinearity, the frequency
characteristie of the sensor is analyzed. Test results show that
nonlinear vibration phenomenon does exist in micromachine vibration
beams, and the calculated curves of the formulas derived accords with
the measured data. Finally, the ways to reduce the nonlincarity are
introduced.
Key words:
Microsensor Micromachine Nonlinear vibration
CLC No: O322
Received
20000606, received in revised form 20001110
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