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Abstract:
Based on the understanding of symmetry of the microstructures and
applied load are not same, the lateral vibration of electro-static
driven comb microresonant which suspended by four crab-leg flexure is
investigated. It is found that the simple mechanical model of it is a
super-fluous system with five unknown variables. The calculating way of
the stress, lateral displacement, spring coefficient and resonant
frequency is deducted. Compared with the model of steady system, which
published before, the result shows the essential aspect of this problem.
Key words:
MEMS
Electro-static driven microresonator Crab-leg flexural suspension
Lateral vibration analysis
CLC No: TH703
国家自然科学基金资助项目和上海市教委重点学科研究资助项目. 选自2000年第一届国际机械工程学术会议， received in revised
form 20010322
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