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Abstract: The compliant micromanipulator requires very high
positioning accuracy, which mainly depends on its static stiffness.
Aiming at the shortcomings in existing analysis for static stiffness of
compliant micromanupulators, compliance matrix method in structural
analysis is applied. To specify it, compliance models of the flexible
elements are determined firstly; the static stiffness matrix of the end-effector
in relation to the reference coordinate system is obtained through the
transformations of a series of different coordinate systems and the
establishment of equilibriums of displacements and forces in unit nodes
of the robot. At last, taken a 3DOF parallel compliant micromanipulator
for instance, its static stiffness is discussed. The analysis show that
the result by using compliance matrix method is very rapid as well as
more approach to the essence of compliant mechanisms.
Key words: Compliant mechanism Compliance matrix Static stiffness
Micromanipulator Flexure hinge
CLC No: H112.5
国家自然科学基金(50075010)和国家863计划(863-512-98-04-23)资助项目. Received 20010218,
received in revised form 20010912
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