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Abstract: A new active controlled air bearing is presented based on
the modern control theory. In the system, the micro-displacement of
piezoelectric ceramics is used to compensate the bearing’s error caused
by the vary of air membrane thickness with internal interference under
the stable pressure of air supply. Based on the theoretical model, the
optimal design of 2-D controller is introduced, so that the system has
many advantages: high precision, fast respond, powerful
anti-interference, and the analysis of dynamic characteristics about
bearing system is achieved. A theoretical basis is provided for
application of active controlled air bearing.
Key words: Air bearing Active control Piezoelectric ceramics Dynamic
characteristics
CLC No: TH133.36
国家自然科学基金资助项目(59975012).
Received 20001205, received in revised form 20010928
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