|
Abstract: A
process of cryogenic polishing without abrasive is proposed ,which
combines abrasiveless polishing and cryogenic polishing. This new
process gains super-smooth surface on optical material with angstrom
dimension (Ra<1 nm). By various experiments , the effects of water
quality of polishing disk , time of modifying ice disk, polishing
pressure and eccentricity on surface roughness are studied. Results show
that this process can reach surface roughness with angstrom dimension.
Key words: Optical material Without abrasive Cryogenic polishing
Supersmooth surface
CLC No: TG580
国家自然科学基金资助项目(59975043).
Received 20010108, received in revised form 20020011010
|