INVESTIGATION OF CUTTING OF Si3N4 ENGINEERING CERAMICS WITH Q-SWITCHED PULSE CO2 LASER

Hong Lei

(Tsinghua University)

Li Lijun  Ju Chunlei

(Hunan University)

Abstract: Cutting of Si3N4 engineering ceramics with Q-switched pulse CO2 laser. Considering the effective shape of the cut front that has influence to the absorption of the laser beam, a mathematics model considering a simplified 2D geometry based on the geometry of a pulsed laser cut during vaporization cutting process is developed. This model is based on the energy balance. The experiment results show that it would realize crack-free cutting by using high speed and multi-pass cutting.

Key words: Si3N4  Q-switched pulse CO2 laser  Cutting   Mathematics model

CLC No: TG442

国家自然科学基金资助项目(59875018). Received 20000524, received in revised form 20020010916