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Abstract: Mechanical stability and sticking are the troublesome
problems in the microfabrication process and operating when components
in MEMS working in the sub-micrometer regime, where some quantum
mechanical effects, hitherto neglected, will need to be taken into
account, for example, the Casimir effect. The analysis of the role of
the Casimir effect on a membrane strip structure considering roughness,
conductivity and temperature corrections is presented. With nothing
other than the Casimir force loading the strip, there exist a stable
static equilibrium state and an unstable static equilibrium state. The
state can be determined by the value of dimensionless constant K. The
membrane strip will collapse if A" is larger than the critical value of
K{. Thisjprovides a way to check if a system of given dimensions and
material properties will have a stable equilibrium position. This also
provides a way to design a membrane strip with high aspect ratio (Ll§)
that is not easily to collapse into the surface.
Key words: Casimir
force MEMS Polysilicon Stability Sticking
CLC No: TH117
博士点基金资助项目(2000000338)和江苏大学高级人才基金项目(1663000004). Received 20011113,
received in revised form 20020510 |