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Abstract: A non-contacting and harmless image measurement system is
presented. According to the measurement characteristic of micromachined
device’s dimension, the system is setup by plane CCD as image sensor.
The measurement principle and algorithm of typical plane geometric
dimension is also discussed. The results of experiment show that the
system is steady and precision.
Key words: Micro-machined devices Geometric dimension Image measurement
CLC No: TP391.4
容闳基金资助项目. Received 20020828, received in revised form 20021020
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