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Abstract: The
polishing of a diamond film by EDM is such that the surface of the
diamond film is coated with a layer of electrically conductive material
in advance, and then EDM method is employed to process it. As a result, the peaks on the surface of the diamond film are removed rapidly. In the
discharge experiment of single pulse, the effect of the coated material
on the removal of CVD diamond film has been investigated in detail. It
is evident that the graphitization of the surface of CVD diamond film
ensures EDM to be continued. The polishing experiment by EDM with rotary
electrode indicates the effect of continuous polishing under the action
of rotary electrode, by which a physical model of polishing by EDM is
put forward.
Key words: CVD diamond films EDM polishing
CLC No: TG661
国家自然科学基金(59875014)和广东省自然科学基金(980423)资助项目.
Received 20020830, received in revised form 20021030
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