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Abstract: The high temperature pressure sensor based on the micro
electromechanical system (MEMS) technology, which takes use of the high
temperature SOI sensitive element and girder-film combined design, is
designed. It possesses the higher frequency response and is able to
endure high and instantaneous ultrahigh temperature. The sensor is used
in checking and measuring the pressure beyond 0~220 ℃ harsh environment,
and is able to endure 1 000 ℃ instantaneous impact. The structure model
and testing data are supplied, and the result is satisfied.
Key words: High temperature pressure sensor Girder-film combined
design Instantaneous impact
CLC No: TP212
国家“863”计划资助项目(2002AA404470).
Received 20020830, received in revised form 20021030
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