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Abstract: The microfabrication process flow of glass is proposed, the
glass wet etching as the priority research area is discussed and
demonstrated. A series of comparable experiments are done to observe the
etching effects with different etching solutions, at the same time the
effects of different etching conditions, such as etching temperature,
rabbling mechanism, cleaning interval on the etching results are
investigated and studied experimentally. The research targets are mainly
for two typical applications, high etching rate for deep etching such
for micro pumps and high surface quality etching for capillary channels.
The results are also compared and analyzed to determine the scope of
applications of different etching solutions and conditions, which
provides basic scheme and experience curves for fabrication of
microfluidic devices with glass.
Key words: MEMS Glass Wet etching Microfluidic devices
CLC No: TN271
国家“863”高技术发展计划(2002AA404220)、国家自然科学基金(50175098)
和教育部科学技术研究重点基金(109102-A20202)资助项目. Received 20030507, received in
revised form 20030628
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