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Abstract: Microactuator
droved new type functional material is one of key technologies of
precision machining, ultraprecision machining and micro-machinery. Study
on microactuator’s drive element, structural design, precision control,
machining and manufacturing, and so on, is with significance and use
value. outstanding properties of piezoelectric material, shape memory
alloy and magnetostriction, and driving principle and design feature of
microactuator droved above materials is analyzed respectively.
Development trend of microactuator technology droved functional material
is expounded, and key technologies of development of microactuator
droved functional material are indicated.
Key
words: New
type functional material Microactuator Driving technology
CLC No: TG156
纪念《机械工程学报》创刊50周年——“机械工程技术的历史、进展与展望”主题征文. 国家自然科学基金(50275021)和教育部高校博士点专项基金(2000014109)资助项目.
Received 20030621, received in revised form 20030725
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