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Abstract: The actuality and trend of developments and applications on
micro electromechanical sensors since initial stage of 20 century eight
decade are introduced. The international advance levels and native
research achievements of inertial micro electromechanical sensors, and
their application futures in both fields of military and civilian are
discussed in emphases. The farther study aspects of micro
electromechanical sensors are brought forward finally.
Key words: Micro electromechanical systems Micro electromechanical
sensors Inertial micro electromechanical sensors
CLC No: TP212.9
纪念《机械工程学报》创刊50周年——“机械工程技术的历史、进展与展望”主题征文. 国家微纳米预研项目(41308050103, 41308050108).
Received 20030704, received in revised form 20030805
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