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Abstract: The new technologies of rapid prototyping and micro electro
mechanical systems (MEMS) and its microfabrication are introduced, and
the advantages and disadvantages of some microfabrications based on
rapid prototyping and their new progress are contrastively analyzed. For
studying the technique of laser-induced selective chemical liquid
deposition based on rapid prototyping (LCLD&RP), firstly the whole
system principles and craft process are discussed, and its some
advantages and disadvantages are pointed out. Some experiments about
laser-induced selective chemical deposition of copper on common glass
from solution are accomplished, and the point, the line and the thin
film of copper are deposited successfully, and the delamination
deposition is also realized. According to our initial experimental
results, the analyses of deposition principles and reaction principles
and the foundation of the model of reaction rates and deposition rates,
the feasibility of LCLD&RP’s application on three dimension
microfabrication is discussed and demonstrated.
Key words: Rapid prototyping Laser-induced Selective chemical
deposition Microfabrication Micro-parts
CLC No: TG156.8
Received
20011226, received in revised form 20020730.
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