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Abstract: An equivalent circuit model of vibratory micro-machined
gyroscope’s mechanical properties is derived according to its working
principle. Equivalent electrical model of gyroscope consists of
differential detection capacitance model and equivalent circuit model of
oscillating. This simulated model combines the sensor’s electrical
property with mechanical property. The model is implemented in the
circuit simulated tool which is called PSPICE, equivalent electrical
model of gyroscope is available in oscillating properties analysis and
frequency response to angular rate analysis to optimize its working
mode. The model also enables the sensor simulate with the interfacing
electronics and analyze the whole character of the sensor and its
circuit, thus optimizing design of testing circuits.
Key words: Micromachined gyroscope Equivalent electrical model
CLC No: V241.5
国家973资助项目(G1999033101).
Received 20010525, received in revised form 20021028
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