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Abstract: Electrostatic bearings are subject to performance limits
which are commonly resulted from the limited suspen-sion voltage and its
slew rate supplied by high-voltage amplifiers. The choice of the
suspension voltage has to satisfy various demands and its final
solution, according to the analytical results, is determined by the
requirements of load capacity, unbalanced force suppression, and voltage
distortion. Meanwhile, the force slew rate which is limited by the power
consumption of high-voltage amplifiers introduces nonlinear behaviors.
The problem of identifying the suspension voltage and its slew rate when
used in an electrostatic bearing with a known structure subject to a
known load is solved by the derived equations.
Key words: Electrostatic
bearing Electrostatic force High-voltage amplifier
Suspension voltage Voltage slew rate
CLC No: TH133.3
国防基础与应用研究“十五”预研项目(41309020). Received 20010820, received in revised form
20021012
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