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Abstract: A two-step penetration method using the microind-entation
technique is presented to investigate the mechanical properties of thin
films. According to the method, a larger load indentation is employed to
exhibit the influence of substrate deformation and film thickness on the
measured hardness values, then a smaller load selected corresponding to
the first step and with which the measurement will not be affected by
the substrate is applied to measure the authentic hardness and elastic
modulus of the films. Experiments with TiN films deposited on high speed
steel, metallic nickel films on single silicon and (Ti,Al)N/VN
multilayers show that by using this method, the mechanical properties of
most different films can be measured accurately and reliably.
Additionally, the results of the experiments on (Ti,Al)N/VN multilayered
thin films using this method indicate that there exist superhard and
supermodulus effects in this system.
Key words: Two-step penetration method Thin films Nanomultilayers
Hardness Elastic modulus
CLC No: TG115.5.1
O484
Received
20011114, received in revised form 20020530
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