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Abstract: Diamond coated tools are fabricated using WC-Co cemented
carbide inserts as substrates by the electronically aided hot filament
chemical vapor deposition(EACVD).The new substrate pretreatment methods
are investigated to enhance the adhesion of diamond films. An efficient
measure is presented to inhabit the catalytic effect of cobalt. The new
CVD processes are proposed to improve the surface roughness of diamond
thin films. The research results show that the pretreatment using Ar-H2
etching decarburization by microwave plasma is an effective method to
enhance adhesive strength. An adequate amount of additive can
effectively prevent the overflow of Co from inner to surface of the
substrate and avoid the catalytic effect of Co during CVD. The smooth
diamond film with low surface roughness can be deposited by increasing
the carbon source concentration and reducing the reactive pressure at
the later stage of CVD process. Owing to the fabrication and application
of diamond thin films with the low surface roughness and high adhesion
strength, it is of great significance for improvement of the cutting
performance of diamond-coated tools and development of high efficiency
and precision cutting technology.
Key words: Diamond thin films Adhesive strength Surface roughness
Cutting performance
CLC No: TG74
国家863计划新材料领域纳米专项基金(2002AA302613)和国家自然科学基金(50005013)资助项目.
Received 20011008, received in revised form 20021101
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