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Abstract: Based on conventional electrical discharge machining (EDM),
a new method is presented to fabricate tungsten microelectrode
instantaneously in a single discharge. The influence of the main working
parameters, such as electrode material, polarity, work fluid, pulse
duration, peak current, is analyzed by experiments to obtain the
microelectrode fabrication law. The forming mechanism is discussed
through a lot of experiments and the energy spectrum analysis is carried
out on the fabricated microelectrode. As the result of this research, a
tungsten microelectrode 350 μm in length and 30 μm in diameter can be
fabricated on the top of the tungsten wire 0.125 mm in diameter by this
method. And it can be used as tool electrode in drilling micro-hole. At
the tip of tungsten microelectrode, the radius is about 100 nm. It can
be used as microprobe of scanner and detecting device. This method can
increase the efficiency of microelectrode or microprobe greatly. It will
be one of powerful methods of fabricating microelectrode or microprobe.
Key words: EDM Single discharge Microelectrode Rapid fabrication
Micro-probe
CLC No: TG661
国家863高技术研究发展计划(2001AA421240)和哈尔滨工业大学跨学科交叉性研究基金(HIT.MD2001.06)资助项目.
Received 20020619, received in revised form 20030130
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