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Abstract: The scanning probe microscope (SPM), which was invented
for imaging the surface at the atomic level, is becoming a promising
method for nano/micro machining on solid surface. This method may be the
main way for fabrication of nano/micro devices in the future. Three
machining methods based on SPM are introduced: single atom manipulation,
anode oxidation and mechanical nanomachining. Their features, principles
and present situation are discussed in detail. And the anode oxidation
nanolithography is the important way which may be used in many
manufacture fields. While the mechanical nanomachining can not only be
applied to nanolithography fields, but also to the research of
nanomachining mechanism.
Key words: Single atom manipulation Anode oxidation Mechanical
nanomachining Scanning probe microscope
CLC No: TG501.1
海外青年学者合作研究基金(50028504)和航天支撑技术基金(2001-HT-HGD)资助项目.
Received 20020815, received in revised form 20030420
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