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Abstract: Obtaining
the macro model of MEMS is the key of MEMS system-level modeling and
simulation. The Krylov subspace theory and method are applied to get
reduced order model of MEMS, and the theoretical foundation of Krylov
subspace is introduced. For the common MEMS coupling with
static-electrical and structure, the FEM functions are built, and its
reduced order model can be obtained by using modified Arnoldi algorithm.
It’s shown from example that the reduced order model describes really
the dynamics of the original system, while the computing time and
complexity are reduced to a great extent.
Key words: MEMS
Subspace Macro model Coupled FEM
CLC No: TN402
国家自然科学基金资助项目(50275127).
Received 20030706, received in revised form 20031215
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