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Abstract: In
micro machine devices, defects such as the broken structure and unwanted
anchors exist frequently for the fabrication causes. These defects
influence the performance of the micro machine devices greatly.
Three-dimension dynamic model of micro beam is established and nodal
analysis method is used to analyze the dynamic characteristics of the
micro machine structure. The computational results show that the beam
breaking reduces the stiffness of the micro machine structure and causes
the decrease of its modal frequencies. And that the opposite conclusion
is gained for the unwanted anchor.
Key words: Micro-machine
Defects Dynamic model Modal analysis
CLC No: TH05
国家自然科学基金(50105007)和教育部“跨世纪优秀人才培养计划”基金资助项目.
Received 20030404, received in revised form 20030720
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