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Abatract:
Diamond-like carbon(DLC) films are deposited on Cr17Ni14Cu4 stainless
steel and Si(100) substrates as a function of substrate temperature by
pulsed vacuum arc plasma deposition. The results show that the sp3
carbon atoms content decreas as the
substrate temperature increases. The microhardness of DLC films decrease
when the substrate temperature increases. The DLC films which are
deposited at 100℃
to 300℃ have
the low friction coefficient and good wear resistance.
The wear resistance of the DLC films deposites
on
Cr17Ni14Cu4 substrate is much better than that of Cr17Ni14Cu4 stainless
steel. But the wear resistance decreases as the substrate
temperature increases and the DLC film deposites at 400℃
has low wear resistance. The DLC films have good
adherence with the stainless steel substrate.
Key words:
Diamond-like carbon Wear resistance Pulsed vacuum arc plasma
deposition Microhardness Substrate
temperature
X-ray photoelectron spectroscopy
CLC No: TG17
国家自然科学基金(No.
30370407,30300087)、国家重点基础研究(G1999064706)和国家高技术研究发展计划(102-12-09-1)资助项目.
Received 20030122, received in revised form 20040210
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