|
Abstract: A kind of piezoelectric motor with long-range and nano-step
is introduced. The principle of inchworm motion is based on and improved
in the PZT motor. In structure design, the traditional single actuator
is updated to double actuators. With the novel principle of push-pull
relay movement and proper four-channel driving signals, the PZT motor
can move continuously and smoothly. The performances of the motor are
tested through experiments. The experiment results show that the motion
of the piezoelectric motor is linear, the moving speed can reach 12 mm/s
at the voltage of 300V and the minimal step is less than 6 nm, the
moving range is more than 10mm.
Key words: Piezoelectric motor Inchworm motion Nano-driving Nano-positioning
CLC No: TM282
国家自然科学基金资助项目(50105016). Received 20030813, received in revised form
20040210
|