ANALYSIS OF DEFLECTION AND PULL- IN VOLTAGE

OF A MULTI-LAYER CANTILEVER UNDER AN ELECTROSTATIC LOAD

Nie Meng  Huang Qing’an

(Key Laboratory of MEMS of Ministry of Education, Southeast University, Nanjing 210096)

Wang Jianhua

(School of Science, Hefei University of Technology, Hefei 230009)

Rong Hua

(Key Laboratory of MEMS of Ministry of Education, Southeast University, Nanjing 210096)

Abstract: A novel trial solution of deflection for a multi-layer cantilever under an electrostatic load is presented. The relationship between applied voltage and deflection of the cantilever is analyzed by energy method, with effective gap spacing between the multi-layer cantilever and fixed planar electrode below the cantilever taken into account. The value of normalized deflection at the free tip of the multi-layer cantilever is obtained when pull-in phenomena occur, and analytical equation of pull-in voltage has also been obtained. The results are verified through CoSolveEM module in Coventor, showing high accuracy.   

Key words: Multi-layer cantilever  Trial solution  Effective gap spacing  Pull-in

CLC No: TN304.07  TN401

Received 20030507, received in revised form 20040320