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Abstract: The micro-EDM equipments with three linked axes are
developed. The key technique and realization approach of micro-EDM using
the equipment are also discussed. The micro-energy pulse power source
satisfied with versatile demands is designed by the analysis of the
realization approach. To solve the crawl problem of servo mechanism at
small feed, a suitable control strategy is applied in the equipment. The
microelectrode on-line fabrication and measure is studied and the error
of on-line measure is also discussed. The micro-shaft with minimum
diameter 12 µm and the micro-hole with minimum diameter 25 µm can be
machined stably through lots of experiments on the equipment. And a
micro-facial sculpture with free space curved surface and size 1 mm×0.3
mm×0.18 mm is also machined successfully.
Key words: Micro-EDM Micro-energy pulse power source Servo
control strategy Electrode on-line fabrication and measure
Three-dimensional microstructure
CLC No: TG661
国防基础科研资助项目(K1400061102). Received 20030926, received in revised form
20040426
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