HIGH-PRECISION MAGNETICALLY SUSPENDED

TABLE AND ITS DECOUPLING CONTROL

Li Lichuan

(School of Electrical Engineering, Xi’an Jiaotong University, Xi’an 710049)

Ding Yucheng  Lu Bingheng

(School of Mechanical Engineering, Xi’an Jiaotong University, Xi’an 710049)

Abstract: Design, modeling, decoupling control, as well as experiment results of a high-precision magnetically suspended table are presented. Compared with existing designs, the magnetic suspension and the linear drive in our design are electromagnetically separated, so that the coupling between them is minimized. Presented also are novel designs in the electromagnets and in the arrangement of sensors, which achieves smaller power consumption even without the use of permanent magnets, and maintains redundancy in driving and sensing. This redundancy allows a symmetric structural design that gives uniform (and also improved) noise performance among the control axis.

Key words: Precision motion control  Precision stage   Magnetic suspension  Decoupling control  Magnetic bearings

CLC No: TH133.3

国家自然科学基金资助项目(59975073). Received 20031026, received in revised form 20040425