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Abstract: A novel planar magnetic suspension stage that has the
characteristics of nonlinear, multi-variance and strong coupling is
introduced. Applying the inverse system theory of nonlinear and
multi-variance, a dynamics decoupling control approach is represented to
this linear-motors driven stage to separate the object system into three
subsystem by linear motors by state feedback linearization. At the same
time, disturbance observer is used to attain the full-scale disturbances
suppression. The result of simulation indicate the proposed scheme have
better dynamic and static characteristics and robust.
Key words: Planar magnetic suspension stage Dynamic decoupling
control Precision positioning Linear motor Disturbance
observer
CLC No: TM921.541
Received 20040412, received in
revised form 20041010
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