VIBRATION ANALYSIS OF A DOUBLE- LAYER PIEZOELECTRIC ACTUATOER FOR MICROPUMP

Kan Junwu  Wu Yihui  Xuan Ming

(Changchun Institute of Optics Fine Mechanics and Physics, Chinese Academy of Science, Changchun 130025)

Yang Zhigang  Wu Boda  Cheng Guangming

(College of Mechanical Science and Engineering, Jilin University, Changchun 130025)

Abstract: In order to enhance the performance of piezoelectric micropumps, the Rayleigh method is utilized to investigate the fixed-edge double-layer piezoelectric actuator for micropumps. As a result of it, the relationship between the performance parameters (the resonant frequency and effective electromechanical-coupling parameter) and the structural parameters (the diametric ratio β and thickness ratio α of piezoelectric membrane to metal plate) is figured out. Given the correlative material parameters, the performance parameters with the structural parameters as variable can be worked out to obtain an optimal actuator. The natural frequency of the actuator made in Japan is calculated and tested, and the results show great agreement with each other. When the thickness ratio α and the diametric ratio β are 0.3 and 0.6 respectively, the effective electromechanical-coupling parameter reaches its maximum value (0.52).

Key words: Piezoelectric actuator   Vibration analysis  Rayleigh method

CLC No: TH38

国家863计划(2002AA404250)和国家自然科学基金(59975040)资助项目. Received 20040223, received in revised form 20040730