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STUDY ON
TURNING TECHNICS OF BIG
DIAMETER-LENGTH RATE MICRO-SHAFT
Zhang Mingjun Yin Guofu
(Manufacturing Science and
Engineering School, Sichuan University, Chengdu 610065)
Yuan Guanghui
(China Academy of Engineering
Physics, Mianyang 621900)
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Abstract: Manufacturing part at micron or nanometer scale is key
technology for developing MEMS. Firstly designing a diamond tool by
experiments, it’s main parameters as follow: Kr
=93°,
K'r
=30°,
g0
=0°,
a0
=5°. Furthermore using this tool turning as small as
f7mm
micro-shaft. Then researching the relationship between micro-shaft’s
surface quality and the main turning technical parameters such as feed,
spindle speeds and the amount of back infeed. The results indicate that
the feed not noly effect the surface quality of shaft, but also effect
the shaft taking shape whether or not. In the range of shaped, the feed
has marked influence, it direct ratio to roughness; the back infeed and
spindle speed have little influence. As an example, presenting some
samples based on different machining parameters.
Key words: Micro-shaft machining Precision cutting MEMS
Micron-nanometer part
CLC No: TH161
国家自然科学基金(50275100)和国家863高技术研究发展计划(2001AA411150)资助项目.
Received 20040619, received in revised form 20020041030
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