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Abstract: Two nonlinear and coupled models governing the
electrostatic forces are described for a class of electrostatic bearings
with a bias voltage in each electrode, followed by comparison of the
derived force models with their numeric integration results. It is shown
that the force model expressed by power series of the rotor
displacements is accurate only for small motion range while the
approximate model is applicable for initial levitation of the bearing
with large range of the rotor motion. The necessary conditions for the
initial levitation are also discussed to achieve a stable levitation of
the rotor inside the electrode cavity in an arbitrary orientation. The
simulation results for a three-axis suspended system in various
orientations are presented based on the approximated force model.
Key words: Electrostatic bearing Electrostatic force Initial
levitation Coupled nonlinearities
CLC No: TH133.3
U666
国防基础与应用研究“十五”预研基金(41309020)和中国博士后科学基金资助项目.
Received 20040427, received in revised form 20020040923
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