|
Abstract: A
new “U”-type piezoelectric micro-actuator with two lead magnesium
niobate-lead zirconate titanate Piezoelectric (PMN-PZT) multilayer
elements bonded to a stainless steel(SUS304) substrate for positioning a
magnetic head for high-density hard disk devices has been fabricated and
analyzed. This PMN-PZT micro-actuator is made using a tape-casting
technique to deposit PMN-PZT thick-films and applying screen-printing
processes to fabricate Ag/Pd electrodes. After that, an U-type
micro-actuator attached to each side via piezoelectric elements is also
practically measured by laser Doppler vibrometer in order to testify the
driving mechanics of it. The highest displacement/voltage sensitivity
and corresponding resonance frequency are achieved by the
micro-actuator. This micro-actuator is also simulated by finite element
method. The results reveal that the piezoelectric element with
multi-layer structure is particularly effective in increasing the
driving capacity of the piezoelectric micro-actuator.
Key words: Lead magnesium niobate-lead zirconate titanate
Piezoelectric Multilayer element “U”-type micro-actuator
Dual-stage serve system
CLC No: TH7
TN4
国家973计划(2003CB716200)和国家自然科学基金(90206022)资助项目.
Received 20040413, received in revised form 20041125 |