COMPOSITION AND MECHANICAL PROPERTIES OF TiN/Ti-O GRADIENT FILMS PREPARED BY PLASMA IMMERSION

ION IMPLANTATION AND DEPOSITION

Wen Feng  Huang Nan  Sun Hong  Wan Guojiang

(School of Materials Science and Engineering, Southwest Jiaotong University, Chengdu 610031)

Abstract: Titanium oxide titanium nitrogen gradient films are prepared on Si, Ti6Al4V and low temperature isotropic carbon(LTIC) by plasma immersion ion implantation and deposition (PIII-D) under three different processes. The pushing of the metal cathode source and the variation of gas composition are controlled by programmable logical control (PLC). The mechanical properties of the synthesized films are investigated by nano-indentation tests, pin-on-disc wear experiments, and scratch test. The results show that maximum hardness of the gradient films achieves 19.5 GPa, and the maximum adhesion between films and substrate is 68 N or so. Structure investigation results show that the surface Ti-O layer of the films is rutile structure. The gradient characteristics of the films are supported by qualitative analysis of second ion mass spectroscopy (SIMS). X-ray photoelectron spectra (XPS) analyses the surface of synthesized films. The results of XPS show that synthesized films are non-stoichiometric, whose composition are identified as TiO2, Ti2O3 and TiO. Scanning electron microscope (SEM) is used to observed wear trace and scratch trace of the TiN/Ti-O gradient films. The results show that the films have good wear resistance and high adhesion strength.

Key words: Plasma immersion ion implantation(PIII)  X-ray photoelectron spectra(XPS)  TiN/Ti-O gradient film

CLC No: TQ02  TB302.3

国家973资助项目(G1999064705). Received 20040417, received in revised form 20040910