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Abstract: The frequency characteristics of a two-degrees laterally
vibrating MEMS filter are analyzed. With the fabrication error on the
sidewall of fold beam being considered, the first sensitivity functions
of two natural frequency to the fabrication error are derived. A simple
relationship between the proof mass and perimeter, and the beam width is
developed. Some important conclusions between the width of fold beam,
the width of compensatory-hole wall and the number of compensatory-hole
are presented for the filter design, and a robust design scheme is
developed. Design examples are given finally. The results and principles
presented can be used to design and analyze other multiple degrees of
freedom MEMS devices.
Key words: MEMS Microelectromechanical Filters Robust resign
CLC No: O357
TN703
国家自然科学基金(50305002)和江苏省高校自然科学研究计划(03KJB510089)资助项目.
Received 20041210, received in revised form 20050225
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