|
Abstract: Approach of global microvision-based visual servoing for
micropositioning is analyzed. Imaging model of G-stereoscopic microscope
is derived. According to techniques of image-based visual servoing and
stereovision, 3D visual servoing model for micropositioning is built up.
The experiments to verify its precision and feasibility are conducted
with in-house micromanipulation system and the error factors to affect
the precision of micropositioning are analyzed too. The pivotal
parameters are acquired through calibration. From the experiment
results, the positioning error is about ±(3～4)μm with this visual
servoing model for micropositioning. Its precision and stability can be
satisfied for micropositioning.
Key words: Micropositioning Visual servoing Micromanipulation
Stereo vision
CLC No: TP242
国家自然科学基金(50275023)和国家863重大专项(2003AA404180)资助项目.
Received 20040526, received in revised form 20041228
|