STUDY ON SCANNING PROBE STYLUSES

FOR SURFACE PROFILE MEASUREMENT

Huang Qiangxian

(College of Instrumentation, Hefei University of Technology, Hefei 230009)

Takahashi Ken    Hatsuzawa Takeshi

(Precision and Intelligence Laboratory, Tokyo Institute of Technology, Yokohama 226-8503)

Abstract: Using piezo-electrical PVDF (Polyvinilidene fluor-ide) and micro-fork, and combining with tungsten probes respectively, three kinds of surface scanning probe styluses were developed. Cooperating with x-y piezo-electrical driving stage, these new styluses constitute scanning probe microscopes based on the same operating mechanism of the tapping mode AFM. The schematic structures and characteristics of these styluses were introduced, and then the measurement results obtained by the developed system were given. The results proved the effectiveness of the new scanning styluses.

Key words: PVDF  Micro-fork  Scanning probe  Stylus  SPM

CLC No: TH71  TH89

安徽省现代测试与质量控制重点实验室资助项目. Received 20041024, received in revised form 20050310