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Abstract: The
surface error of aspheric mirror during grinding ranges from tens of
microns to a few microns, proper measurement method will decide the
convergent speed and precision of the error in this range. The form
error digitization technique is thoroughly analyzed in view of the
grinding process, and the linearity error matrix that affects error
contraction accuracy is also established. Moreover the matrix is
testified utilizing a co-axis parabolic mirror after magnetorheological
finishing with figure accuracy of 60 nm (Root Mean Square, RMS), the
testing result shows the matrix has good effect to remove linearity
error and provide exact data information, guarantees the testing results
closely link with the manufacturing process and decreases the cycles
entering into optical polishing process.
Key
words: Magnetorheological
Polishing Asphere Fine lapping Profile measurement
CLC No: TG76
国家自然科学基金资助项目(50175062).
Received 20040915, received in revised form 20050320
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