FABRICATION OF MICRO-PIN BASED

ON ELETROCHEMICAL ETCHING

WANG Minghuan  ZHU Di  ZHANG Zhaoyang

(College of Mechanical and Electrical Engineering,Nanjing University of Aeronautics and Astronautics, Nanjing 210016)

Abstract: Based on electrochemical principle, the micro-pin used in micro-machining is fabricated. The shaping mechanism of the micro-pin is analyzed in detail. A model about the process of electrochemical etching is developed. The shape and the diameter of the micro-pin are controlled by precisely determining voltage and time. At the mean time, various parameters that affect the results of experiment are discussed in detail, which include controlling of voltage, current changing, concentration of the electrolyte and effect of time of etching on the diameter of micro-pin etc. The law of micro-pin forming derived from the discussion. The comparison between experiment and theory proves the validity of theory model. Ultimately, a tungsten micro-pin of total long with 1180mm are prepared, with which the thinner part of front is 300mm in length and 6 micrometer in diameter, the aspect ratio is 50:1. The micro-pin could be used in micro machining.

Key words: Electrochemical etching  Micro-pin  Micro machining

CLC No: TN16  TG662

国家自然科学基金资助项目(50375073). Received 20050714, received in revised form  20051216