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Abstract:
The
structural style of steel flexure hinge is applied to design of silicon
micromachining structures. Polysilicon thin film flexure hinges and the
on line testing device are fabricated using surface micromachining
process, and the thickness of structure layer is 2 mm. Character of
polysilicon thin film flexure hinge is researched and tested. Take right
circular polysilicon thin film flexure hinge as an example, the
rotational stiffness calculated using the macro theory is 8 N·mm/rad and
the tested result is 120 N·mm/rad. Through theory analysis and
measurements, it is found that the macroscopic machine model of flexure
hinge could not be applied for the design of micromachining thin film
flexure hinge properly because of the size-effect. According to
experimental data, the formula used in macroscopic machine is modified
to meet the design and calculation of micromachining thin film flexure
hinge.
Key words:
Micromachine Polysilicon Thin film Key words: Flexure hinge
Right circular hinge MEMS
CLC No: TH112
国家自然科学基金(50135054)和上海市科技发展基金(0111nm020)资助项目
. Received 20050614,
received in revised form 20051205
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