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Abstract: A
high speed precision positioning x-y table with new elastic decoupling
mechanism is developed based on the voice coil actuator direct driving.
The motors are placed on the base, so that the small moving mass makes
it possible that the positioning table moves at high speed and
precision. The decoupling theory is expatiated. By use of the FEA and
dynamic simulation method, the dynamic characteristics of the high speed
table are studied. Based on the dynamic response of rigid and elastic
body, the spring as the key component in the decoupling mechanism is
investigated. The influence of the flexibility of hinge on the spring
stiffness and preload is discussed in detail, and the influence of the
spring stiffness and preload on the positioning table is also given. At
last, the matching law of the spring stiffness and preload is presented.
The achieved results would be helpful to the dynamic design of the kind
of manufacturing equipment. All design parameters achieved and the
design theory also prove its correctness in the precision experiment.
Key words:Positioning
table Dynamic simulation and design Elastic components Spring
CLC No: TP27
国家863计划资助项目(2003AA404-04).Received
20050602,received in revised form 20051214
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