GYROSCOPE BASED ON SUBSTRUCTURE MODEL

LIU Guangjun ¹   WANG Anlin ²  JIANG Tao ¹  JIAO Jiwei ³  ZHANG Zhengfu ¹

(1. School of Mechanical Engineering, Shanghai Jiaotong University, Shanghai 200030;

2. School of Mechanical Engineering, Tongji  University, Shanghai 200092;

3. State Key Laboratory of Transducer Technology, Shanghai Institute of Microsystem and Information Technology,

Chinese Academy of Sciences, Shanghai 200050)

Abstract: The detection capacitance analysis method based on substructure model for the tuning fork vibratory micro-machined gyroscope fabricated by the bulk silicon micro-machining technology is put forward by employing the dynamic finite element theory of multi-degree of freedom, and the simulation of the micromachined gyroscope under working state is also realized to establish the mechanism model of fabrication defect to the performance of the micro-machined gyroscope with high precision and solve the problem of long computation time of optimization of micro-machined structure. The simulation is verified by experiments. From the analysis of the illustration, the important phenomena that the process variance and error of micro-machined gyroscope don’t influence the natural frequency much but influence final output characteristic of detectioncapacitance greatly is found. Based on promotion of analysis precision and efficiency, the analysis method and result have important reference value to the analysis and evaluation of   robust performance of the tuning fork vibratory micro-machined gyroscope in coupled multiphysics fields environment.

Key words: Micromachined gyroscope  Substructure  Detection capacitance  Process error

CLC No: TP212

国家自然科学基金 (50475019, 50390063), 国家863计划(2005AA- 404020)资助项目. Received 20051030,  received in revised form 20060308