REVIEW OF THE CURRENT SITUATION OF
ULTRA-PRECISION MACHINING

YUAN Julong WANG Zhiwei WEN Donghui LÜ Binghai DAI Yong

(Ultra-precision Machining Research Center, Zhejiang University of Technology, Hangzhou 310014 )

Abstract: Ultra-precision machining is invariably used in the production of components of the highest quality in terms of form accuracy, surface finish accuracy and surface integrity. The optical, mechanical, and electronic application of advanced ceramics and glasses may require high form and finish accuracy (e.g. roughness in the angstrom range), the depth and nature of the subsurface damage resultant from processing may be equally important. For economic manufacture and for improved reliability of brittle materials, an understanding of the mechanisms of material removal in ultra-precision machining processes, as well as the nature damage imparted, is essential pre-requisites. The historical progress of ultra-precision machining is plotted, and some significant advanced ultra-precision ma-chining techniques with emphasis on the mechanisms of material removal in the processing of brittle work materials is focused on. Ultra-precision cutting, grinding and polishing are involved and compared in terms of finishing accuracy and efficienty. Semibonded abrasive machining is introduced which aims to high finishing accuracy and high efficiency. The probable further trend of ultra-precision machining is forecasted.

Key words: Ultra-precision machining Abrasive machining Semibonded abrasive machining

CLC No: F416.4

2006年中国机械工程学会年会推荐论文. 国家自然科学基金(50535040)和浙江省自然科学基金(Y105610)资助项目. Received 20061205,  received in revised form 20061213