DESIGN OF HIGH RESOLVING CAPABILITY STM.IPC-205BJ

TYPE ATOMIC FORCE MICROSCOPE

PENG Guanghan^{1, 2}  YANG Xueheng³  XIN Hongzheng³  LIU Jichun³  LI Xu³

(1. College of Automation, Chongqing University, Chongqing 400030;
2. Department of Physics and Electronic Science, Hunan University of Arts and Science, Changde 415000;
3. College of Mathematics and Science, Chongqing University, Chongqing 400030 )

Abstract: Based on a high resolving capability scanning tunneling microscope and development on hardware and software design, a new-style higher resolving capability and more useful AFM is developed. The principles of operation, components and some applications of the AFM system is resported. And the special design of the lens body and control process and the manufacture and work process of cantilever are introduced in detail. The AFM adopted a new simple and useful cantilever. This model uses an STM to detect the shift of the cantilever and uses four motors and two PZT tubes to enlarge the scanning rage and to enhance the resolution effectively. The AFM’s resolving capability is as follows: transverse: 0.1 nm, vertical: 0.01 nm. Several images given as samples are obtained with the model.

Key words: Atomic force microscope(AFM) Lens body Cantilever Hardware design

CLC No: O562.2

国家自然科学基金(59775069)、湖南省教育厅(06C606)、湖南文理学院自然科学基金(JJQD05051)资助项目. Received 20060307, received in revised form 20060926