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Abstract: A 3-PPSR parallel micromanipulator with 6-DOF driven by piezoelectric actuators is presented to avoid the complex structure and reduce the assembly error of the usual 6-limed ones. It is very compact and helpful to improve the accuracy using the monolithic bottom stage and only three fixed-length rods with flexure hinges at the two ends. To analyze the static stiffness, which is an important index that affects the accuracy of the manipulator, the inverse kinematics and the relation between the end-effectors’ position and pose and the micro deformation of the flexure hinges is derived from series of coordinates transformations firstly. As to the elastic deformation of the flexure hinges, the static stiffness matrix of the manipulator is developed via the principle of virtual work. Based on this model, the influence of the parameters for the stiffness of the manipulator is discussed. Thus the effect of the radii of the hinge circles and the dimensions of the flexure hinges on stiffness are obtained. The results provide tutorial for configuring the stiffness and designing the structural parameters of the parallel micromanipulator further.
Key words: Parallel micromanipulator Flexure hinges Static stiffness
CLC No:
TP242
国家自然科学基金(50605013)和哈尔滨工业大学优秀青年教师培养计划(HITQNJS.2006.032)资助项目.
Received
20070215,
received
in
revised
form
20070923
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