Length-traceable Nanometrological
Dynamic Mode AFM with Sub-nano Accuracy

HUANG Qiangxian^{1, 2}  GONDA Satoshi ³  MISUMI Ichiko³  KUROSAWA Tomizzo³

(1. College of Instrumentation Science and Opto-electronic Engineering, Hefei University of Technology, Hefei 230009;
2. State Key Laboratory of Precision Measuring Technology and Instruments, Tianjin University, Tianjin 300072;
3. National Institute of Advanced Science and Technology, Tsukuba 305-8563, Japan)

Abstract: Cooperated with a length-traceable three-axis interferometer measurement system, a dynamic mode atomic force micros- copy (AFM) is designed and developed. In the AFM, the three-axis interferometer measurement system is used to measure the relative displacement between the AFM probe and specimen surface. Because the x, y and z measuring axes of the interferometer system are orthogonal and intersect at a certain point near AFM probe tip, the Abbe’s error of the AFM system is avoided primarily and very high measurement accuracy is obtained. Furthermore, the three-axis interferometer system is used to feedback control the movement of stage in x and y directions. Therefore, the influences of AFM piezoelec trical elements’ demerits on lateral dimensions are eliminated completely. By analysis, the AFM system achieves sub-nano accuracy in the average pitch measurement of nano grating standard.

Key words: Length-traceable  Laser interferometer  Dynamic mode atomic force microscopy  Nano-metrology

CLC No: TH71 TH89

日本新能源和产业技术开发组织 (P02045)及天津大学精密测试技术及仪器国家重点实验室开放基金资助项目. Received 20070209, received in revised form 20071126

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