Displacement Control of Piezoceramic Micro-motion Worktable Using Self-sensing

CUI Yuguo¹  DONG Weijie²  GAO Changyin³  SUN Baoyuan³

(1. Faculty of Engineering, Ningbo University, Ningbo 315211;
2. School of Electronicand Information Engineering, Dalian University of Technology, Dalian 116023;
3. School of Mechanical Engineering, Dalian University of Technology, Dalian 116023)

Abstract: A self-sensing actuator without independent sensor is used to measure displacement of a piezoceramic micromotion worktable, and a displacement self-sensing control system is made. For a piezoceramic actuator, the free charges on the wafer surfaces contain the displacement information of the actuator, thus based on the integrator circuit, the displacement self-sensing for the piezoceramic actuator is proposed and also the integrator circuit is designed. This self-sensing method greatly facilitates circuit adjustment, easy to acquire sensitive signal and avoids the shortcoming of impedance mismatching met in bridge circuit. The self-sensing displacement is the feedback signal of control system of piezoceramic micro-motion worktable. In order to improve the static and dynamical performance of the piezoceramic micro-motion worktable, the compounding control method by combining feedforward control and feedback control is designed. The comparison experiments are performed in order to contrast the self-sensing compounding control with other control methods, such as the forwardfeed control, the PID control with independent sensor and the compounding control with independent sensor. The experimental results show that self-sensing compounding control has the same good performance of compounding control with independent sensor.

Key words: Micro-motion worktable  Piezoceramic actuator Self-sensing  Integrator  Compounding control

CLC No: TH703.8  T211⁺.4  TP274^+.5  TP273^+.3

国家自然科学基金(50305001)、浙江省自然科学基金(Y104209)和浙江省教育厅科研基金(20040883)资助项目. Received 20070322, received in revised form 20070916

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