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Anodic Bonding
Mechanism of ZrO2 Electrolyte
Ceramics and Al
LIU Cuirong 1, 2 MENG Qingsen1 LU Xiaoying1 LIU Zijian
2
(1. School of Materials Science and Engineering, Taiyuan University of Technology,Taiyuan 030024;
2. School of Materials Science and Engineering, Taiyuan University of Science and Technology, Taiyuan 030024)
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Abstract: The technological experiment of anodic bonding is carried out between ZrO2 electrolyte ceramics and metal Al. Under certain technological parameters, and on universal electronic material testing machine, the test of shearing strength is carried out on the anodic bonding joint between ZrO2 electrolyte ceramics and metal Al. By means of the scanning electron microscope, super-light element energy spectrometer and X-ray diffraction instrument, the microstructure of joint interface, element distribution, phase structure of interface and shearing section are analyzed. Experimental results are as follows: The ZrO2 surface activating treatment has improved the ZrO2/Al joint; the high oxygen ion mobility caused by the joint interface under the condition of anodic bonding and the electrostatic field force are the major factors to promote the bonding; the multi-interface solid phase reaction of ZrO2-SiO2-Al2O3 in transition region is the main cause for the formation of bonding; the location of shear fracture of ZrO2/Al joint is on the bonding interface between ZrO2 and transition region, the initial crack area is located on the near interface of ZrO2, then extends and ends on the interface between metal Al and transition region; the morphology of fracture in the terminate area shows that the Al/transition region interface has high joint quality.
Key words: ZrO2 conductive ceramics Aluminum Anodic bonding Joint interface Microstructure Joint mechanism
CLC No:
TG457
国家自然科学基金资助项目(50375105, 50671070).
Received
20070526,
received
in
revised
form
20080310
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