Abstract: A scanning probe microscope with high resolution and wide
measuring range(140μm×140μm) is presented, which is constructed
only with six machined components and can measure the nanotopography of magnetic and optical disk substrate of
diameter 130 mm directly. By changing the measuring probe, this
instrument can work in the multiple operation modes, such as
scanning tunneling microscope, atomic force microscope, magnetic
force microscope and electrostatic force microscope. Some
experimental results, such as the atomic resolution image of
graphite, the nanotopography of optical grating, and
ultragrinding surface are given.
Key words: Scanning
probe microscope Wide measuring range Atomic resolution and
nanotopography
*
This project
is supported by National Natural Science and National Education
Committee Foundation of China. Manuscript received on April 2, 1996
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