Abstract:
I nm roughness value of silicon surface by diamond turning is
obtained firstly and three novel techniques are proposed. The
surface integrity is studied in detail by using atomic force
microscope, scanning electron microscope, and stylus surface
instrument. The diamond tool sharpness has a considerable
influence on the machined surface, therefore a novel
technique-brightness modulation for measuring accurately the
edge of the cutter is proposed. Mirror surfaces are assessed by
another novel technique-a measure of their reflectivity. A third technique,
single grit diamond machining is carried out. It supplies an
experimental evidence for verifying the obtained high quality
turned surfaces.
Key words: Mirror
surfaces Diamond turning Brittle materials Single frit machining
Manuscript received on
May 28, 1997
|